Vacuum / Cleanroom lifting stages
Our vacuum lifting stages are used for high precision, vertical positioning for min. cleanroom ISO 6. They are used separately or in combination with linear stages, if probes or components need to be adjusted vertically.
201/5000 Even more axes for your vacuum applications:
Even more axes for your vacuum applications?
Almost all atmospheric standard axes are anodized with UHV lubrication for residual pressures up to 10-6 mbar - or even better - available. Click here for the overview of our standard axes!
Dowload our product catalogue: