High-performance positioning solutions for wafer and chip production
We will find the best technical solution for you to increase your throughput and make inspection processes more effective. We develop the desired systems customized to your application - from test labs to automated semiconductor factories up to ISO 14644-1 up to class 1. Use our proven solutions for demanding conditions such as HV, UHV and EUV für Restdrücke bis 10-12 mbar.
 System Quality Special parts production for exotic components, metrology laboratories and quality assurance DIN EN ISO 9001:2015 & DIN EN ISO 50001:2018 |  100% Individuality Customer-specific development of individual components up to a ready-for-use system 150 years customized solutions |  Reduce development costs Technical consulting from the first minute, fast 3D designs and prototypes up to series production more than 3.900 m² production area |
High-precision production up to large series
- High-end prototypes and series production for UV, HV, EUV
- > 3,900 m² area for the assembly of large machines and systems
- 100% lexibility including any machining processe
- > 5.000 pcs capacity for your production from batch size 1 up to series production
- Life cycle tests, safety concepts und documentation
